Jungcheol Lee

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Evaluation of silicon oxynitride thin films as a passivation layer for surface acoustic wave filter in relation to nitrogen concentration

Number of pages: 29 Posted: 07 Nov 2025

Mingue Cha, Yeongha Song, Jungcheol Lee, Taekjoo Lee, Pung Keun Song and Seohan Kim

Pusan National University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Pusan National University and Uppsala University

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