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Yusin Yang

affiliation not provided to SSRN

SCHOLARLY PAPERS

1

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Scholarly Papers (1)

1.

Correlation of Spectroscopically Resolved Interface and Bulk Defects to Electrical Properties in Ultrathin HfAlO MOS Capacitors

Number of pages: 31 Posted: 22 Nov 2025
Ajou University, Ajou University, Ajou University, Ajou University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Ajou University - Department of Materials Science & Engineering
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Abstract:

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High-k dielectric, Hafnium aluminum oxide (HfAlO), Trap, Band alignment, Spectroscopic characterization