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Qing-Yang Huang

Xiamen University of Technology

Xiamen

China

SCHOLARLY PAPERS

1

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41

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0

Scholarly Papers (1)

1.

Growth Mechanism and High Anti-Reflective Coating Application of PEALD-Lif Films Under Various Plasma Powers

Number of pages: 35 Posted: 22 Dec 2025
Xiamen University of Technology, Xiamen University of Technology, Fuzhou University, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Fujian Jiangxia University, National Chi Nan University and Xiamen University of Technology
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Abstract:

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Lif Film, Plasma Power, Plasma Enhanced Atomic Layer Deposition, Deposition Mechanism, Anti-Reflective Coating