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Shui-Yang Lien

Xiamen University of Technology

SCHOLARLY PAPERS

12

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464

TOTAL CITATIONS

1

Scholarly Papers (12)

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1.

Broadband antireflective soda-lime glass via synergistic hydrothermal nanotexturing and PEALD AlF3 modification

Number of pages: 33 Posted: 01 Jan 2026
Yu-Qi Lin, Zhi-Xuan Zhang, Wen-Xuan Zhu, Wei-Jie Tang, Peng Gao, Yu Qiu, Qi-Zhen Chen, Chia-Hsun Hsu, Shui-Yang Lien, Wan-Yu Wu and Dong-Sing Wuu
Xiamen University of Technology, Fuzhou University, Xiamen University of Technology, Xiamen University of Technology, affiliation not provided to SSRN, Fujian Jiangxia University, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, National United University and National Chi Nan University
Downloads 73 (852,604)

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soda-lime glass, wet-etching, antireflection, AlF3, atomic layer deposition

2.

Superior Performance of ZnGaO Solar-Blind Photodetectors by Implementing TFT Structure and Tunable ZNO Cycle Ratio

Number of pages: 34 Posted: 06 Apr 2024
Hui-Chen Fan, Chen Wang, Yi-Hong Xu, Teng-Min Fan, Pao-Hsun Huang, Yu-Jiao Ruan, Tingzhu Wu, Hao-Chung Kuo, Dong-Sing Wuu, Feng-Min Lai and Shui-Yang Lien
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Jimei University (JMU), Xiamen University of Technology, Xiamen University, National Chiao Tung University, National Chi Nan University, Da-Yeh University and Xiamen University of Technology
Downloads 55 (1,010,164)
Citation 1

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High performance, ZnGaO film, TFT-type solar-blind photodetector, plasma enhanced atomic layer deposition, ZnO cycle ratio

3.

Plasma Power Effect on Crystallinity and Density of Peald-Aln Thin Films： Toward Increasing Dielectric Constant and Breakdown Electric Field

Number of pages: 44 Posted: 20 Jun 2023
Xiao-Ying Zhang, Duan-Chen Peng, Jia-Hao Yan, Zhi-Xuan Zhang, Yu-Jiao Ruan, Juan Zuo, An Xie, Wan-Yu Wu, Dong-Sing Wuu, Chien-Jung Huang, Feng-Min Lai, Shui-Yang Lien and W. Z. Zhu
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, National United University, National Chi Nan University, National University of Kaohsiung, Da-Yeh University, Xiamen University of Technology and Xiamen University of Technology
Downloads 49 (1,074,648)

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Keywords: Aluminum nitride, Density, Crystallinity, Breakdown electric field, Remote plasma atomic layer deposition

4.

Growth Mechanism and High Anti-Reflective Coating Application of PEALD-Lif Films Under Various Plasma Powers

Number of pages: 35 Posted: 22 Dec 2025
Wen-Xuan Zhu, Chen Wang, Zhi-Xuan Zhang, Qing-Yang Huang, Cong Yi, Yu-Li Su, Jian-Gui Wang, Jie He, Xiao-Ying Zhang, Yu Qiu, Dong-Sing Wuu and Shui-Yang Lien
Xiamen University of Technology, Xiamen University of Technology, Fuzhou University, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Fujian Jiangxia University, National Chi Nan University and Xiamen University of Technology
Downloads 40 (1,183,237)

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Lif Film, Plasma Power, Plasma Enhanced Atomic Layer Deposition, Deposition Mechanism, Anti-Reflective Coating

5.

Investigation of Amorphous (in X Ga1- X )2o3 Alloy Films Modulated by Indium Content for Optimization in Solar-Blind Photodetector

Number of pages: 30 Posted: 25 Jun 2024
Chen Wang, Yu-Chao Zhang, Teng-Min Fan, Cong Yi, Chen-Hao Zhou, Pin-Chun Kang, Wan-Yu Wu, Dong-Sing Wuu, Feng-Min Lai and Shui-Yang Lien
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, National United University, National Chi Nan University, Da-Yeh University and Xiamen University of Technology
Downloads 39 (1,196,171)

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amorphous (InxGa1-x)2O3 alloy film, indium content, pulsed laser deposition, films properties, solar-blind photodetectors

6.

Ultra-Low Temperature Ozone Annealing for Decreasing Sub-Threshold Swing of Oxide Thin Film Transistors

Number of pages: 29 Posted: 22 Jan 2025
Qi-Zhen Chen, Jia-Hao Yan, Wan-Qiang Fu, Ming-Jie Zhao, Yun-Shao Cho, Chien-Jung Huang and Shui-Yang Lien
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, affiliation not provided to SSRN, National University of Kaohsiung and Xiamen University of Technology
Downloads 38 (1,209,354)

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ozone annealing, low SS, oxide TFT, ultra-low temperature

7.

High-Purity and Oxygen-Free MgF2 Thin Films by Newly Designed Plasma-Enhanced Atomic Layer Deposition

Number of pages: 29 Posted: 10 Jan 2026
Zhi-Xuan Zhang, Xiao Lin, Jing Zhang, Wen-Xuan Zhu, Peng Gao, Yu Qiu, Chia-Hsun Hsu, Zhi-Xian Lin, Shui-Yang Lien, Chen Wang, Wan-Yu Wu and Dong-Sing Wuu
Fuzhou University, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, affiliation not provided to SSRN, Fujian Jiangxia University, Xiamen University of Technology, Fuzhou University, Xiamen University of Technology, Xiamen University of Technology, National United University and National Chi Nan University
Downloads 36 (1,236,159)

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magnesium fluoride, antireflection, plasma enhanced atomic layer deposition, substrate temperature, refractive index

8.

High-Quality Aln/Gan Layers with Low Dislocation Density Deposited on Sapphire Substrate by Plasma-Enhanced Ald

Number of pages: 39 Posted: 16 Sep 2022
Xiao-Ying Zhang, Duan-Chen Peng, Jing han, Fang-Bin Ren, Shi-Cong Jiang, Ming-Chun Tseng, Yu-Jiao Ruan, Juan Zuo, Wan-Yu Wu, Dong-Sing Wuu, Chien-Jung Huang, Shui-Yang Lien and W. Z. Zhu
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, National United University, National Chi Nan University, National University of Kaohsiung, Xiamen University of Technology and Xiamen University of Technology
Downloads 35 (1,249,711)

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Keywords: Aluminum nitride, atomic layer deposition, substrate temperature.

9.

Investigation of Low Temperature Amorphous (in X Ga1- X )2o3 Films Modulated by Indium Content for Optimization in Solar-Blind Photodetector

Number of pages: 30 Posted: 10 Jul 2024
Chen Wang, Yu-Chao Zhang, Teng-Min Fan, Cong Yi, Chen-Hao Zhou, Pin-Chun Kang, Wan-Yu Wu, Dong-Sing Wuu, Feng-Min Lai and Shui-Yang Lien
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, National United University, National Chi Nan University, Da-Yeh University and Xiamen University of Technology
Downloads 26 (1,372,601)

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amorphous (InxGa1-x)2O3 film, indium content, Pulsed Laser Deposition, films properties, solar-blind photodetectors

10.

Cu-Doped Lithium Oxide Films with High Mobility and Bandgap Prepared by Pulsed Direct-Current Sputtering

Number of pages: 30 Posted: 04 Sep 2023
Zhi-Xuan Zhang, Jie Huang, Chia-Hsun Hsu, Ming-Jie Zhao, Qi-Hui Huang, Wan-Yu Wu, Yi-Jui Chiu, Dong-Sing Wuu, Feng-Min Lai, Shui-Yang Lien and W. Z. Zhu
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, National United University, Xiamen University of Technology, National Chi Nan University, Da-Yeh University, Xiamen University of Technology and Xiamen University of Technology
Downloads 26 (1,372,601)

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p-type, mobility, band gap, copper oxide, lithium oxide, pulsed DC

11.

Effect of Al/Ga Elemental Ratio on Properties of Alxga1-Xn Films Using Super-Cycle Plasma Enhanced Atomic Layer Deposition

Number of pages: 26 Posted: 14 Jul 2023
Zhi-Xuan Zhang, Fang-Bin Ren, Chia-Hsun Hsu, Xiao-Ying Zhang, Peng Gao, Wan-Yu Wu, Dong-Sing Wuu, Linqin Jiang, Yu Qiu, Feng-Min Lai, Shui-Yang Lien and W. Z. Zhu
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, affiliation not provided to SSRN, National United University, National Chi Nan University, Fujian Jiangxia University, Fujian Jiangxia University, Da-Yeh University, Xiamen University of Technology and Xiamen University of Technology
Downloads 24 (1,399,036)

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AlGaN, plasma enhanced atomic layer deposition, supercycle, Thin film

12.

Effect of substrate temperature on properties and emission mechanism of erbium oxide prepared by plasma enhance atomic layer deposition

Number of pages: 34 Posted: 09 Jan 2026
Xiao-Ying Zhang, Ye-Lan Li, Yong-Hao Luo, Yi-Fan Tang, Yu-Jiao Ruan and Shui-Yang Lien
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology and Xiamen University of Technology
Downloads 23 (1,411,822)

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Erbium oxide, plasma enhanced atomic layer deposition, substrate temperature