Keywords: Aluminum nitride, Density, Crystallinity, Breakdown electric field, Remote plasma atomic layer deposition
Ag/Cu composite; AgSnO2In2O3 rivet-type contacts; BTA; DEA; corrosion inhibition
Keywords: Aluminum nitride, atomic layer deposition, substrate temperature.
Spectroscopic ellipsometry, Nb-Ta Anodic Oxides, High-throughput screening, Defect density, Self-contained multi-sample fitting