default author photo

Zhi-Xuan Zhang

Xiamen University of Technology

Xiamen

China

  • Xiamen University of Technology

SCHOLARLY PAPERS

2

DOWNLOADS

73

TOTAL CITATIONS

0

Scholarly Papers (2)

Actions:
Email selected abstracts
1.

Plasma Power Effect on Crystallinity and Density of Peald-Aln Thin Films： Toward Increasing Dielectric Constant and Breakdown Electric Field

Number of pages: 44 Posted: 20 Jun 2023
Xiao-Ying Zhang, Duan-Chen Peng, Jia-Hao Yan, Zhi-Xuan Zhang, Yu-Jiao Ruan, Juan Zuo, An Xie, Wan-Yu Wu, Dong-Sing Wuu, Chien-Jung Huang, Feng-Min Lai, Shui-Yang Lien and W. Z. Zhu
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, National United University, National Chi Nan University, National University of Kaohsiung, Da-Yeh University, Xiamen University of Technology and Xiamen University of Technology
Downloads 49 (1,074,648)

Abstract:

Loading...

Keywords: Aluminum nitride, Density, Crystallinity, Breakdown electric field, Remote plasma atomic layer deposition

2.

Effect of Al/Ga Elemental Ratio on Properties of Alxga1-Xn Films Using Super-Cycle Plasma Enhanced Atomic Layer Deposition

Number of pages: 26 Posted: 14 Jul 2023
Zhi-Xuan Zhang, Fang-Bin Ren, Chia-Hsun Hsu, Xiao-Ying Zhang, Peng Gao, Wan-Yu Wu, Dong-Sing Wuu, Linqin Jiang, Yu Qiu, Feng-Min Lai, Shui-Yang Lien and W. Z. Zhu
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, affiliation not provided to SSRN, National United University, National Chi Nan University, Fujian Jiangxia University, Fujian Jiangxia University, Da-Yeh University, Xiamen University of Technology and Xiamen University of Technology
Downloads 24 (1,399,036)

Abstract:

Loading...

AlGaN, plasma enhanced atomic layer deposition, supercycle, Thin film