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Linqin Jiang

Fujian Jiangxia University

No. 2 Xiyuangong Road

University Town

Fuzhou, 350108

China

SCHOLARLY PAPERS

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Scholarly Papers (1)

1.

Effect of Al/Ga Elemental Ratio on Properties of Alxga1-Xn Films Using Super-Cycle Plasma Enhanced Atomic Layer Deposition

Number of pages: 26 Posted: 14 Jul 2023
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, affiliation not provided to SSRN, National United University, National Chi Nan University, Fujian Jiangxia University, Fujian Jiangxia University, Da-Yeh University, Xiamen University of Technology and Xiamen University of Technology
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Abstract:

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AlGaN, plasma enhanced atomic layer deposition, supercycle, Thin film