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Jia-Hao Yan

Xiamen University of Technology

Xiamen

China

  • Xiamen University of Technology

SCHOLARLY PAPERS

2

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88

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Scholarly Papers (2)

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1.

Plasma Power Effect on Crystallinity and Density of Peald-Aln Thin Films： Toward Increasing Dielectric Constant and Breakdown Electric Field

Number of pages: 44 Posted: 20 Jun 2023
Xiao-Ying Zhang, Duan-Chen Peng, Jia-Hao Yan, Zhi-Xuan Zhang, Yu-Jiao Ruan, Juan Zuo, An Xie, Wan-Yu Wu, Dong-Sing Wuu, Chien-Jung Huang, Feng-Min Lai, Shui-Yang Lien and W. Z. Zhu
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, National United University, National Chi Nan University, National University of Kaohsiung, Da-Yeh University, Xiamen University of Technology and Xiamen University of Technology
Downloads 49 (1,074,648)

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Keywords: Aluminum nitride, Density, Crystallinity, Breakdown electric field, Remote plasma atomic layer deposition

2.

Ultra-Low Temperature Ozone Annealing for Decreasing Sub-Threshold Swing of Oxide Thin Film Transistors

Number of pages: 29 Posted: 22 Jan 2025
Qi-Zhen Chen, Jia-Hao Yan, Wan-Qiang Fu, Ming-Jie Zhao, Yun-Shao Cho, Chien-Jung Huang and Shui-Yang Lien
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, affiliation not provided to SSRN, National University of Kaohsiung and Xiamen University of Technology
Downloads 39 (1,209,354)

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ozone annealing, low SS, oxide TFT, ultra-low temperature