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Qi-Zhen Chen

Xiamen University of Technology

Xiamen

China

  • Xiamen University of Technology

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Scholarly Papers (1)

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Ultra-Low Temperature Ozone Annealing for Decreasing Sub-Threshold Swing of Oxide Thin Film Transistors

Number of pages: 29 Posted: 22 Jan 2025
Qi-Zhen Chen, Jia-Hao Yan, Wan-Qiang Fu, Ming-Jie Zhao, Yun-Shao Cho, Chien-Jung Huang and Shui-Yang Lien
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, affiliation not provided to SSRN, National University of Kaohsiung and Xiamen University of Technology
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Abstract:

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ozone annealing, low SS, oxide TFT, ultra-low temperature