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Ming-Chun Tseng

Xiamen University of Technology

Xiamen

China

SCHOLARLY PAPERS

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Scholarly Papers (1)

1.

High-Quality Aln/Gan Layers with Low Dislocation Density Deposited on Sapphire Substrate by Plasma-Enhanced Ald

Number of pages: 39 Posted: 16 Sep 2022
Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, National United University, National Chi Nan University, National University of Kaohsiung, Xiamen University of Technology and Xiamen University of Technology
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Abstract:

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Keywords: Aluminum nitride, atomic layer deposition, substrate temperature.