High performance, ZnGaO film, TFT-type solar-blind photodetector, plasma enhanced atomic layer deposition, ZnO cycle ratio
Ni-doped Ga2O3, RTA, Ozone, Annealing Temperature
NiGaO, Oxygen vacancy, photodetector, oxygen flow ratio
RF-sputtered, β-Ga2O3, rapid thermal annealing, ultrafast process