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Yu-Quan Zhu
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Ultrafast RTA Induced the Structural Properties of the Deficient Oxygen Β-Ga2o3 Film
Number of pages: 24
Posted: 21 Feb 2023
Pao-Hsun Huang
, Yu-Quan Zhu,
Su-Fen Wei
,
Yi Liu
,
Chien-Jung Huang
,
Feng-Min Lai
,
Jing Liu
and
Shui-Yang Lien
Jimei University (JMU),
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, National University of Kaohsiung, Da-Yeh University,
affiliation not provided to SSRN
and Xiamen University of Technology
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29
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Abstract:
RF-sputtered, β-Ga2O3, rapid thermal annealing, ultrafast process
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