Yi-Fan Tang

Xiamen University of Technology

Xiamen

China

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Effect of substrate temperature on properties and emission mechanism of erbium oxide prepared by plasma enhance atomic layer deposition

Number of pages: 34 Posted: 09 Jan 2026

Xiao-Ying Zhang, Ye-Lan Li, Yong-Hao Luo, Yi-Fan Tang, Yu-Jiao Ruan and Shui-Yang Lien

Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology and Xiamen University of Technology

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