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Qi-Zhen Chen

Xiamen University of Technology

Xiamen

China

  • Xiamen University of Technology

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Broadband antireflective soda-lime glass via synergistic hydrothermal nanotexturing and PEALD AlF3 modification

Number of pages: 33 Posted: 01 Jan 2026
Yu-Qi Lin, Zhi-Xuan Zhang, Wen-Xuan Zhu, Wei-Jie Tang, Peng Gao, Yu Qiu, Qi-Zhen Chen, Chia-Hsun Hsu, Shui-Yang Lien, Wan-Yu Wu and Dong-Sing Wuu
Xiamen University of Technology, Fuzhou University, Xiamen University of Technology, Xiamen University of Technology, affiliation not provided to SSRN, Fujian Jiangxia University, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, National United University and National Chi Nan University
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Abstract:

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soda-lime glass, wet-etching, antireflection, AlF3, atomic layer deposition