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Xiao Lin

Xiamen University of Technology

Xiamen

China

SCHOLARLY PAPERS

1

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38

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0

Scholarly Papers (1)

1.

High-Purity and Oxygen-Free MgF2 Thin Films by Newly Designed Plasma-Enhanced Atomic Layer Deposition

Number of pages: 29 Posted: 10 Jan 2026
Fuzhou University, Xiamen University of Technology, Xiamen University of Technology, Xiamen University of Technology, affiliation not provided to SSRN, Fujian Jiangxia University, Xiamen University of Technology, Fuzhou University, Xiamen University of Technology, Xiamen University of Technology, National United University and National Chi Nan University
Downloads 38 (1,236,159)

Abstract:

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magnesium fluoride, antireflection, plasma enhanced atomic layer deposition, substrate temperature, refractive index