Author Page for Inhong Hwang

Inhong Hwang

Inha University

253 Yonghyun-dong

Nam-gu Incheon 402-751

Korea, Republic of (South Korea)

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Atomic Layer Deposition of Ga2O3 over a Wide Temperature Range Using a Novel Heteroleptic Precursor (N,N-di-tert-butylacetimidamido)dimethylgallium (DBADMGa)

Number of pages: 29 Posted: 21 Mar 2026

In-Hwan Baek, Inhong Hwang, Junyong Lee, Dahui Jeon, Rino Choi, Jeong-Hwan Lee, Noh-Hwal Park, Hyeonwoo Park, Changbong Yeon, Jaesun Jung and Chee Won Chung

Inha University, Inha University, Inha University, Inha University, Inha University, Inha University, Inha University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Inha University

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Inhong Hwang

Inha University

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Scholarly Papers (1)

Atomic Layer Deposition of Ga2O3 over a Wide Temperature Range Using a Novel Heteroleptic Precursor (N,N-di-tert-butylacetimidamido)dimethylgallium (DBADMGa)

Abstract: