253 Yonghyun-dong
Nam-gu Incheon 402-751
Korea, Republic of (South Korea)
Inha University
SnS2, Atomic layer deposition, gas sensors, proton conduction, NO2, room-temperature
SrTiO3, DRAM capacitor, atomic layer deposition, equivalent oxide thickness
Ga2O3, Thin film, atomic layer deposition, Oxide Semiconductor, Field effect transistor