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Sung Haeng Cho

Electronics and Telecommunications Research Institute

218 Gajeong-ro, Yuseong-gu

Daejeon, 305-700

Korea, Republic of (South Korea)

  • Electronics and Telecommunications Research Institute

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Scholarly Papers (1)

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Low Temperature Crystallization of Atomic-Layer-Deposited Srtio3 Films with an Extremely Low Equivalent Oxide Thickness of Sub-0.4 Nm

Number of pages: 26 Posted: 23 Feb 2024
Hong Keun Chung, Jihoon Jeon, Han Kim, Myoungsu Jang, Sung-Chul Kim, Sung Ok Won, In-Hwan Baek, Yoon Jang Chung, Jeong Hwan Han, Sung Haeng Cho, Tae Joo Park and Seong Keun Kim
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Korea Institute of Science and Technology (KIST), Inha University, Korea University, Seoul National University of Science and Technology, Electronics and Telecommunications Research Institute, Hanyang University and Korea Institute of Science and Technology (KIST)
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SrTiO3, DRAM capacitor, atomic layer deposition, equivalent oxide thickness