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Sung-Chul Kim

affiliation not provided to SSRN

SCHOLARLY PAPERS

4

DOWNLOADS

200

TOTAL CITATIONS

0

Scholarly Papers (4)

1.

Unlocking the Potential of Porous Bi2te3-Based Thermoelectrics Using Precise Interface Engineering Through Atomic Layer Deposition

Number of pages: 31 Posted: 02 Jan 2024
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Korea Institute of Science and Technology (KIST), Korea Institute of Science and Technology (KIST), Korea University, Ulsan National Institute of Science and Technology (UNIST) - Department of Materials Science and Engineering, affiliation not provided to SSRN, Korea Institute of Science & Technology, Korea Institute of Science and Technology (KIST), Hanyang University and Korea Institute of Science and Technology (KIST)
Downloads 80 (803,225)

Abstract:

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Bi2Te3, thermoelectric, Porous materials, Atomic layer deposition, ZnO

2.

Low Temperature Crystallization of Atomic-Layer-Deposited Srtio3 Films with an Extremely Low Equivalent Oxide Thickness of Sub-0.4 Nm

Number of pages: 26 Posted: 23 Feb 2024
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Korea Institute of Science and Technology (KIST), Inha University, Korea University, Seoul National University of Science and Technology, Electronics and Telecommunications Research Institute, Hanyang University and Korea Institute of Science and Technology (KIST)
Downloads 52 (1,063,489)

Abstract:

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SrTiO3, DRAM capacitor, atomic layer deposition, equivalent oxide thickness

3.

Atomic Layer Growth of Pt Films Using Dimethyl(N,N-Dimethyl-3-Butene-1-Amine-N)Platinum and O3

Number of pages: 27 Posted: 11 Apr 2025
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Korea Institute of Science and Technology (KIST), affiliation not provided to SSRN and Korea Institute of Science and Technology (KIST)
Downloads 46 (1,133,231)

Abstract:

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platinum, O3, Atomic layer deposition, Nucleation

4.

Phase evolution and nucleation control of continuous and ultrathin ruthenium films via oxidant-controlled atomic layer deposition

Number of pages: 29 Posted: 15 Jun 2026
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Korea Institute of Science and Technology (KIST), affiliation not provided to SSRN and Korea Institute of Science and Technology (KIST)
Downloads 22

Abstract:

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ruthenium, O3, Atomic layer deposition, phase evolution, nucleation