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Taehwan Lee
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Phase evolution and nucleation control of continuous and ultrathin ruthenium films via oxidant-controlled atomic layer deposition
Number of pages: 29
Posted: 15 Jun 2026
Minseok Kim
, Taehwan Lee,
Seungwan Ye
,
Sung-Chul Kim
,
Sung Ok Won
,
Ryosuke Harada
and
Seong Keun Kim
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, Korea Institute of Science and Technology (KIST),
affiliation not provided to SSRN
and Korea Institute of Science and Technology (KIST)
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Abstract:
ruthenium, O3, Atomic layer deposition, phase evolution, nucleation
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