14 gil 5 Hwarangno, Seongbuk-gu
Seoul, 02792
Korea, Republic of (South Korea)
Korea Institute of Science and Technology (KIST)
monolithic, complex oxides, BEOL, single crystals, tunable functionalities
Bi2Te3, thermoelectric, Porous materials, Atomic layer deposition, ZnO
thermoelectric, Bi2Te3, volatile, eutectic, thermal annealing
SrTiO3, DRAM capacitor, atomic layer deposition, equivalent oxide thickness
platinum, O3, Atomic layer deposition, Nucleation
ruthenium, O3, Atomic layer deposition, phase evolution, nucleation