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Minseok Kim

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

2

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67

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Scholarly Papers (2)

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1.

Atomic Layer Growth of Pt Films Using Dimethyl(N,N-Dimethyl-3-Butene-1-Amine-N)Platinum and O3

Number of pages: 27 Posted: 11 Apr 2025
Minseok Kim, Taeseok Kim, Jihoon Jeon, Gwang Min Park, Sung-Chul Kim, Sung Ok Won, Ryosuke Harada and Seong Keun Kim
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Korea Institute of Science and Technology (KIST), affiliation not provided to SSRN and Korea Institute of Science and Technology (KIST)
Downloads 46 (1,133,231)

Abstract:

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platinum, O3, Atomic layer deposition, Nucleation

2.

Phase evolution and nucleation control of continuous and ultrathin ruthenium films via oxidant-controlled atomic layer deposition

Number of pages: 29 Posted: 15 Jun 2026
Minseok Kim, Taehwan Lee, Seungwan Ye, Sung-Chul Kim, Sung Ok Won, Ryosuke Harada and Seong Keun Kim
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Korea Institute of Science and Technology (KIST), affiliation not provided to SSRN and Korea Institute of Science and Technology (KIST)
Downloads 21

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ruthenium, O3, Atomic layer deposition, phase evolution, nucleation