default author photo

Hyeonwoo Park

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

1

DOWNLOADS

36

TOTAL CITATIONS

0

Scholarly Papers (1)

Actions:
Email selected abstracts
1.

Atomic Layer Deposition of Ga2O3 over a Wide Temperature Range Using a Novel Heteroleptic Precursor (N,N-di-tert-butylacetimidamido)dimethylgallium (DBADMGa)

Number of pages: 29 Posted: 21 Mar 2026
In-Hwan Baek, Inhong Hwang, Junyong Lee, Dahui Jeon, Rino Choi, Jeong-Hwan Lee, Noh-Hwal Park, Hyeonwoo Park, Changbong Yeon, Jaesun Jung and Chee Won Chung
Inha University, Inha University, Inha University, Inha University, Inha University, Inha University, Inha University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Inha University
Downloads 36 (1,304,549)

Abstract:

Loading...

Ga2O3, Thin film, atomic layer deposition, Oxide Semiconductor, Field effect transistor