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Yaozong Zhong

affiliation not provided to SSRN

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Effective Removal of ICP Etching Damage at the GaN Regrowth Interface through MOCVD In-situ Cleaning

Number of pages: 27 Posted: 14 May 2026
Tengfei Li, Haoran Qie, Hongwei Gao, Wenwen Li, Yaozong Zhong, Xiaolu Guo, Xin Chen, Feng Zhang, Yifan Dong, Xinchen Ge, Lin Li, Qian Sun and Hui Yang
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics and Suzhou Laboratory
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GaN regrowth, Interface, Etching damage, TBCl in-situ cleaning, PN diode