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Qian Sun

University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics

SCHOLARLY PAPERS

4

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217

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0

Scholarly Papers (4)

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1.

N-Polar Gan-Aln-Diamond Structure Fabricated by Modified Surface Active Bonding and Selective Dry Etching

Number of pages: 22 Posted: 23 Mar 2025
Ye Tian, Lishu Wu, Guoliang Ma, Yu Zhou, Fengwen Mu, Yu Chen, Sen Huang, Ke Wei, Peng Xu, Chao Yuan, Qian Li, Xinhua Wang, Qian Sun and Xinyu Liu
affiliation not provided to SSRN, affiliation not provided to SSRN, Wuhan University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Wuhan University, Wuhan University, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics and affiliation not provided to SSRN
Downloads 86 (765,566)

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N-polar GaN, GaN-on-Diamond, modified surface activated bonding, selective dry etching

2.

Polarity Control of High Crystalline Quality Aln Thin Films Grown on Si(111) Substrates by Molecular Beam Epitaxy

Number of pages: 30 Posted: 23 Apr 2024
Shizhao Fan, Yuhao Yin, Rong Liu, Haiyang Zhao, Zhenghui Liu, Qian Sun and Hui Yang
University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics, University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics, University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics, University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics, Suzhou Lumixplore Technology Company Limited, University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics and Suzhou Laboratory
Downloads 77 (823,616)

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AlN on Si, polarity, antiphase boundaries, molecular beam epitaxy

3.

Effect of Inductively Coupled Plasma Etching Parameters on N-Al0.5ga0.5n Ohmic Contact

Number of pages: 11 Posted: 08 Dec 2023
Shanshan Yang, Mei-Xin Feng, Yuzhen Liu, Wenjun Xiong, Biao Deng, Yingnan Huang, Chuanjie Li, Qiming Xu, Yanwei Shen, Qian Sun and Hui Yang
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics and Suzhou Laboratory
Downloads 34 (1,263,436)

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n-AlGaN, ohmic contact, ICP etching, xps

4.

Effective Removal of ICP Etching Damage at the GaN Regrowth Interface through MOCVD In-situ Cleaning

Number of pages: 27 Posted: 14 May 2026
Tengfei Li, Haoran Qie, Hongwei Gao, Wenwen Li, Yaozong Zhong, Xiaolu Guo, Xin Chen, Feng Zhang, Yifan Dong, Xinchen Ge, Lin Li, Qian Sun and Hui Yang
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics and Suzhou Laboratory
Downloads 20 (1,491,251)

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GaN regrowth, Interface, Etching damage, TBCl in-situ cleaning, PN diode