Skip to main content
Feedback to SSRN
Feedback
(required)
Email
(required)
Submit
Yingnan Huang
affiliation not provided to SSRN
Contact
affiliation not provided to SSRN
Email
Learn more about SSRN Profiles
SCHOLARLY PAPERS
1
DOWNLOADS
34
TOTAL CITATIONS
0
Feedback
Scholarly Papers (1)
Sort by:
Paper Title, A-Z
Paper Title, Z-A
Author Name, A-Z
Author Name, Z-A
Date Posted, Ascending
Date Posted, Descending
Downloads, Ascending
Downloads, Descending
Citations, Ascending
Citations, Descending
Actions:
Email selected abstracts
View:
Selected
Original List
All Versions
Hide All Versions
All Abstracts
Hide All Abstracts
(Rank)
1.
Effect of Inductively Coupled Plasma Etching Parameters on N-Al0.5ga0.5n Ohmic Contact
Number of pages: 11
Posted: 08 Dec 2023
Shanshan Yang
,
Mei-Xin Feng
,
Yuzhen Liu
,
Wenjun Xiong
,
Biao Deng
, Yingnan Huang,
Chuanjie Li
,
Qiming Xu
,
Yanwei Shen
,
Qian Sun
and
Hui Yang
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics and Suzhou Laboratory
Downloads
34
(1,263,436)
View PDF
Download
Abstract:
n-AlGaN, ohmic contact, ICP etching, xps
Feedback
