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Yu Zhou

affiliation not provided to SSRN

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N-Polar Gan-Aln-Diamond Structure Fabricated by Modified Surface Active Bonding and Selective Dry Etching

Number of pages: 22 Posted: 23 Mar 2025
Ye Tian, Lishu Wu, Guoliang Ma, Yu Zhou, Fengwen Mu, Yu Chen, Sen Huang, Ke Wei, Peng Xu, Chao Yuan, Qian Li, Xinhua Wang, Qian Sun and Xinyu Liu
affiliation not provided to SSRN, affiliation not provided to SSRN, Wuhan University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Wuhan University, Wuhan University, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Science and Technology of China (USTC) - School of Nano-Tech and Nano-Bionics and affiliation not provided to SSRN
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N-polar GaN, GaN-on-Diamond, modified surface activated bonding, selective dry etching