Su-Hwan Choi

Hanyang University

SCHOLARLY PAPERS

2

DOWNLOADS

176

TOTAL CITATIONS

0

Scholarly Papers (2)

Structural, Optical, and Electrical Properties of Inox Thin Films Deposited by Peald for Flexible Device Applications

Number of pages: 30 Posted: 15 Feb 2022
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Hanyang University, affiliation not provided to SSRN and Hanyang University
Downloads 86 (644,176)

Abstract:

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Indium Oxide (InOx), Plasma-Enhanced Atomic Layer Deposition (PEALD), DADI ([3-(dimethylamino)propyl] dimethyl indium) precursor, Crystallinity, Thin-Film Transistor (TFT)

Structural, Optical, and Electrical Properties of Inox Thin Films Deposited by Peald for Flexible Device Applications

Number of pages: 30 Posted: 15 Feb 2022
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Hanyang University, affiliation not provided to SSRN and Hanyang University
Downloads 32 (1,044,771)

Abstract:

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Indium Oxide (InOx), Plasma-Enhanced Atomic Layer Deposition (PEALD), DADI ([3-(dimethylamino)propyl] dimethyl indium) precursor, Crystallinity, Thin-Film Transistor (TFT).

2.

Tailoring Indium Oxide Film Characteristics Through Oxygen Reactants in Atomic Layer Deposition with Highly Reactive Liquid Precursor

Number of pages: 32 Posted: 26 Dec 2023
Hanyang University, Hanyang University, Hanyang University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Hanyang University
Downloads 58 (789,954)

Abstract:

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Indium oxide, atomic layer deposition, oxygen reactants, substrate temperature, crystallinity.