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Ray Duffy

Tyndall National Institute

SCHOLARLY PAPERS

2

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164

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Scholarly Papers (2)

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1.

Electron Beam Lithography and Dimensional Metrology for Spin-Based Quantum Devices on Ge, Ge/Si and Geoi Substrates

Number of pages: 25 Posted: 18 Feb 2023
Nikolay Petkov, Margarita Georgieva, Maksym Myronov, Sinan Bugu, Ray Duffy, Brendan McCarthy, Alan Hynes, Ann-Marie Kelleher, Graeme Maxwell and Giorgos Fagas
affiliation not provided to SSRN, affiliation not provided to SSRN, University of Warwick, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute and Tyndall National Institute
Downloads 87 (759,537)

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Electron beam lithography (EBL), hydrogen silsesquioxane (HSQ), Germanium (Ge), high fidelity/density patterns, line edge metrology, gate-defined quantum dots

2.

Ex-Situ N-Type Heavy Doping of Ge1-Xsnx Epilayers by Surface Sb Deposition and Pulsed Laser Melting

Number of pages: 14 Posted: 18 Apr 2022
Daris Fontana, Francesco Sgarbossa, Ruggero Milazzo, Enrico Di Russo, Emmanuele Galluccio, Davide De Salvador, Ray Duffy and Enrico Napolitani
affiliation not provided to SSRN, Università di Padova, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Tyndall National Institute and affiliation not provided to SSRN
Downloads 77 (830,555)

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Pulsed laser melting, laser processing, Doping, Antimony, GeSn, Ge