default author photo

Maksym Myronov

University of Warwick

Gibbet Hill Rd.

Coventry, CV4 8UW

United Kingdom

  • University of Warwick

SCHOLARLY PAPERS

2

DOWNLOADS

173

TOTAL CITATIONS

0

Scholarly Papers (2)

Actions:
Email selected abstracts
1.

Electron Beam Lithography and Dimensional Metrology for Spin-Based Quantum Devices on Ge, Ge/Si and Geoi Substrates

Number of pages: 25 Posted: 18 Feb 2023
Nikolay Petkov, Margarita Georgieva, Maksym Myronov, Sinan Bugu, Ray Duffy, Brendan McCarthy, Alan Hynes, Ann-Marie Kelleher, Graeme Maxwell and Giorgos Fagas
affiliation not provided to SSRN, affiliation not provided to SSRN, University of Warwick, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute and Tyndall National Institute
Downloads 87 (759,537)

Abstract:

Loading...

Electron beam lithography (EBL), hydrogen silsesquioxane (HSQ), Germanium (Ge), high fidelity/density patterns, line edge metrology, gate-defined quantum dots

2.

Hole Mobility in Compressively Strained Germanium on Silicon Exceeds 7 ×106 Cm²V⁻¹S⁻¹

Number of pages: 18 Posted: 17 Jul 2025
Maksym Myronov, Alex Bogan and Sergei Studenikin
University of Warwick, National Research Council Canada and National Research Council Canada
Downloads 86 (765,566)

Abstract:

Loading...

2DHG, hole mobility, cs-GoS, CVD, heteroepitaxy