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Giorgos Fagas

Tyndall National Institute

Cork

Ireland

  • Tyndall National Institute

SCHOLARLY PAPERS

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Scholarly Papers (1)

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Electron Beam Lithography and Dimensional Metrology for Spin-Based Quantum Devices on Ge, Ge/Si and Geoi Substrates

Number of pages: 25 Posted: 18 Feb 2023
Nikolay Petkov, Margarita Georgieva, Maksym Myronov, Sinan Bugu, Ray Duffy, Brendan McCarthy, Alan Hynes, Ann-Marie Kelleher, Graeme Maxwell and Giorgos Fagas
affiliation not provided to SSRN, affiliation not provided to SSRN, University of Warwick, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute, Tyndall National Institute and Tyndall National Institute
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Abstract:

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Electron beam lithography (EBL), hydrogen silsesquioxane (HSQ), Germanium (Ge), high fidelity/density patterns, line edge metrology, gate-defined quantum dots