Extreme Ultraviolet Lithography (EUVL), Tin-oxo cage, Density Functional Theory (DFT)
Tin particles, Hydrogen plasma, In-situ non-destructive cleaning, Chemical etching, Ion energy
Mo meshes, liquid Sn, hydrogen plasma, corrosion resistance, heat healing
Solid breeding blanket, Li2TiO3 pebble bed, mechanical characteristics, uniaxial compression test
EUV mirrors, Hydrogen plasma cleaning, Sn particles, Ion energy, Ion thermal effect
Sn contamination, Ruthenium oxide, In-situ and non-destructive cleaning, Adsorption and desorption, Oxygen vacancy
EUV Lithography, Carbon interaction dynamics, Carbon Contamination, Ruthenium surface
potential energy function, vibrational spectrum, partition function, thermodynamic properties
