default author photo

Jianxing Liu

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

1

DOWNLOADS

71

TOTAL CITATIONS

0

Scholarly Papers (1)

Actions:
Email selected abstracts
1.

In-Situ Non-Destructive Removal Tin Particles by Low-Energy Plasma for Imitation of Euv Optical Mirrors Self-Cleaning

Number of pages: 27 Posted: 22 Nov 2022
Sishu Wang, Zongbiao Ye, Guo Pu, Jianxing Liu, Li Yang, Wenna Jing, Minging Yu, Fangling Yang, Yichao Peng, Fujun Gou and Jianjun Wei
affiliation not provided to SSRN, Sichuan University, Sichuan University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Sichuan University, affiliation not provided to SSRN, Sichuan University and Sichuan University
Downloads 71 (867,774)

Abstract:

Loading...

Tin particles, Hydrogen plasma, In-situ non-destructive cleaning, Chemical etching, Ion energy