Shuhui Wang

Tsinghua University

Beijing, 100084

China

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Research on Polishing Mechanisms of Various Surfactants in Chemical Mechanical Polishing Relevant to Cobalt Interconnects

Number of pages: 20 Posted: 03 Feb 2023

Lifei Zhang, Shuhui Wang, Tongqing Wang and Xinchun Lu

Tsinghua University, Tsinghua University, Tsinghua University and Tsinghua University

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