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Yu Zhang

Dalian University of Technology

Huiying Rd

DaLian, LiaoNing, 116024

China

  • Dalian University of Technology

SCHOLARLY PAPERS

2

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50

TOTAL CITATIONS

0

Scholarly Papers (2)

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1.

Mechanical Effect of Abrasives on Material Removal and Subsurface Damage in Chemo-Mechanical Grinding for Silicon

Number of pages: 30 Posted: 30 Mar 2023
Yu Zhang, Renke Kang, Jiawei Ren, Hongye Lang and Shang Gao
Dalian University of Technology, Dalian University of Technology, Dalian University of Technology, Dalian University of Technology and Dalian University of Technology
Downloads 33 (1,277,121)

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Chemo-mechanical grinding, silicon, mechanical effect, subsurface damage, stress distribution

2.

Modeling of Material Removal Uniformity in Silicon Wafer Using Nonwoven Structured Grind-Polishing Wheel

Number of pages: 29 Posted: 08 Aug 2025
Yu Zhang, Zhaoqiang Zhang, Renke Kang, Xiaoguang Guo and Shang Gao
Dalian University of Technology, Dalian University of Technology, Dalian University of Technology, Dalian University of Technology and Dalian University of Technology
Downloads 17 (1,491,251)

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Silicon, grinding, material removal uniformity model, grind-polishing wheel