Zhaoqiang Zhang

Dalian University of Technology

Huiying Rd

DaLian, LiaoNing, 116024

China

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Modeling of Material Removal Uniformity in Silicon Wafer Using Nonwoven Structured Grind-Polishing Wheel

Number of pages: 29 Posted: 08 Aug 2025

Yu Zhang, Zhaoqiang Zhang, Renke Kang, Xiaoguang Guo and Shang Gao

Dalian University of Technology, Dalian University of Technology, Dalian University of Technology, Dalian University of Technology and Dalian University of Technology

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