affiliation not provided to SSRN
Hydride vapor phase epitaxySemiconducting III-V materialsNitridesDoping
Gallium Nitride, Ion Implantation, Ion Diffusion, Positron Annihilation Spectroscopy, Low-temperature Photoluminescence, Secondary Ion Mass Spectrometry
gallium nitride (GaN), Aluminum-gallium nitride (AlGaN), Halide Vapor Phase Epitaxy (HVPE), crystal growth, Supersaturation, hydrogen admixture