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Konstantin Rudenko

affiliation not provided to SSRN

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Sos Pseudo-Fefets after Furnace or Rapid Annealings and Thining by Thermal Oxidation

Number of pages: 9 Posted: 19 Jun 2023
Valentin A. Antonov, Fedor Tikhonenko, Владимир Попов, A. V. Miakonkich, Konstantin Rudenko, Viktor Sverdlov and V.A. Volodin
Russian Academy of Sciences (RAS) - Rzhanov Institute of Semiconductor Physics, affiliation not provided to SSRN, Russian Academy of Sciences (RAS) - Rzhanov Institute of Semiconductor Physics, affiliation not provided to SSRN, affiliation not provided to SSRN, Vienna University of Technology and affiliation not provided to SSRN
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Silicon, sapphire, ferroelectric, HfO2 interlayer, phases, pseudo-MOSFETs