R. Heller

Helmholtz-Zentrum Dresden-Rossendorf (HZDR)

SCHOLARLY PAPERS

3

DOWNLOADS

108

TOTAL CITATIONS

0

Scholarly Papers (3)

1.

Effect of a Silicon Dioxide Diffusion Barrier Layer and its Sublimation on the Migration of Strontium Implanted into Sic

Number of pages: 20 Posted: 31 Jul 2023
University of Pretoria, University of Pretoria, University of Pretoria, University of Pretoria, Helmholtz-Zentrum Dresden-Rossendorf (HZDR), affiliation not provided to SSRN, University of Pretoria, affiliation not provided to SSRN and University of Pretoria
Downloads 51 (838,073)

Abstract:

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SiO2, TRISO, RBS, SiC diffusion barrier, Sr

2.

Achieving Ultralow Contact Resistivity in Si via Te Hyperdoping and Millisecond Post-Metallization Annealing

Number of pages: 22 Posted: 03 Jun 2024
Sichuan Normal University, Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Sichuan Normal University, Sichuan Normal University, Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Helmholtz-Zentrum Dresden-Rossendorf (HZDR) - Institute of Ion Beam Physics and Materials Research, Sichuan Normal University, Sichuan Normal University, Helmholtz-Zentrum Dresden-Rossendorf (HZDR) - Institute of Ion Beam Physics and Materials Research and Sichuan Normal University
Downloads 37 (961,800)

Abstract:

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Contact resistance, post-metallization annealing, ion implantation, deep-level impurity, Rutherford backscattering spectrometry/channeling

3.

Tunable Magneto-Transport Properties in Ultra-High Bi-Doped Si Prepared by Liquid Phase Epitaxy

Number of pages: 17 Posted: 17 Oct 2023
affiliation not provided to SSRN, Sichuan Normal University, Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Helmholtz-Zentrum Dresden-Rossendorf (HZDR) - Institute of Ion Beam Physics and Materials Research, Sichuan Normal University and Helmholtz-Zentrum Dresden-Rossendorf (HZDR) - Institute of Ion Beam Physics and Materials Research
Downloads 20 (1,156,046)

Abstract:

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magneto-transport properties, hyperdoping, liquid phase epitaxy regrowth, Bi donor activation, ion-implantation