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Yoon-Seo Kim

Hanyang University

Seoul

Korea, Republic of (South Korea)

SCHOLARLY PAPERS

1

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95

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0

Scholarly Papers (1)

1.

Reliability Engineering of High-Mobility Igzo Transistors Via Gate Insulator Heterostructures Grown by Atomic Layer Deposition

Number of pages: 29 Posted: 05 Dec 2023
Hanyang University, Hanyang University, Hanyang University, affiliation not provided to SSRN and Hanyang University
Downloads 95 (715,072)

Abstract:

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InGaZnO, plasma enhanced atomic layer deposition, heterogeneous gate insulator, high reliability, high mobility