Seoul
Korea, Republic of (South Korea)
Hanyang University
High-k dielectric, trap density reduction, atomic layer deposition, high-pressure annealing, deuterium annealing
InGaZnO, plasma enhanced atomic layer deposition, heterogeneous gate insulator, high reliability, high mobility
Ferroelectric HZO (Hf0.5Zr0.5O2), Rapid Thermal Annealing (RTA), Polarization Field Screening, Interface engineering, Gallium Oxide(Ga2O3), Thermal stability