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Ki-Cheol Song

Hanyang University

Seoul

Korea, Republic of (South Korea)

  • Hanyang University

SCHOLARLY PAPERS

2

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178

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0

Scholarly Papers (2)

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1.

Reduction of Trap Density in High-K Dielectrics Through Optimized Ald Process and High-Pressure Deuterium Annealing

Number of pages: 24 Posted: 09 Dec 2024
Taewon Hwang, Su-Hwan Choi, Ki-Cheol Song, Yeonhee Lee, Jae-Hyeok Kwag, Jun-Yeoub Lee, Chang-Kyun Park and Jin-Seong Park
Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University and Hanyang University
Downloads 132 (561,789)

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High-k dielectric, trap density reduction, atomic layer deposition, high-pressure annealing, deuterium annealing

2.

Precursor Ligand Chemistry-Driven Engineering of SiNx Gate Insulators for Enhanced Oxide TFTs

Number of pages: 32 Posted: 30 Aug 2025
Tae Heon Kim, Sang-Hyun Kim, YuJin Yang, Ji-Min Kim, Tae-Kyung Kim, Ki-Cheol Song, Yeonhee Lee and Jin-Seong Park
Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University and Hanyang University
Downloads 46 (1,133,231)

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Silicon nitride, Plasma-enhanced atomic layer deposition, Precursor chemistry, Gate insulator, Oxide thin-film transistors