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Sang-Hyun Kim

Hanyang University

Seoul

Korea, Republic of (South Korea)

SCHOLARLY PAPERS

1

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46

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0

Scholarly Papers (1)

1.

Precursor Ligand Chemistry-Driven Engineering of SiNx Gate Insulators for Enhanced Oxide TFTs

Number of pages: 32 Posted: 30 Aug 2025
Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University and Hanyang University
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Abstract:

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Silicon nitride, Plasma-enhanced atomic layer deposition, Precursor chemistry, Gate insulator, Oxide thin-film transistors