Jae-Hyeok Kwag

Hanyang University

Seoul

Korea, Republic of (South Korea)

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Reduction of Trap Density in High-K Dielectrics Through Optimized Ald Process and High-Pressure Deuterium Annealing

Number of pages: 24 Posted: 09 Dec 2024

Taewon Hwang, Su-Hwan Choi, Ki-Cheol Song, Yeonhee Lee, Jae-Hyeok Kwag, Jun-Yeoub Lee, Chang-Kyun Park and Jin-Seong Park

Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University, Hanyang University and Hanyang University

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