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Fujun Gou

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

4

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225

TOTAL CITATIONS

1

Scholarly Papers (4)

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1.

Investigation of the Ion Thermal Effect on Tin Contamination Based on Euv Multilayer Mirror Self-Discharge Hydrogen Plasma Cleaning Method

Number of pages: 27 Posted: 20 Jan 2024
Sishu Wang, Zongbiao Ye, Andong Wu, Guo Pu, Xingang Yu, Jianjun Wei and Fujun Gou
affiliation not provided to SSRN, Sichuan University, Chinese Academy of Sciences (CAS) - Lanzhou Institute of Chemical Physics, Sichuan University, affiliation not provided to SSRN, Sichuan University and affiliation not provided to SSRN
Downloads 74 (852,604)

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EUV multilayer mirror, Hydrogen plasma cleaning, Sn particles, Ion energy, Ion thermal effect

2.

Insight into the Re-Deposition Equilibrium of Sn Contaminant on Euv Multi-Layer Mirror Surface During Hydrogen Plasma Cleaning

Number of pages: 27 Posted: 27 Mar 2024
Sishu Wang, Zongbiao Ye, Andong Wu, Qipeng Lu, Yuan Song, Xingang Yu, Jianjun Wei, Tao Gao and Fujun Gou
affiliation not provided to SSRN, Sichuan University, Chinese Academy of Sciences (CAS) - Lanzhou Institute of Chemical Physics, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Sichuan University, Sichuan University and affiliation not provided to SSRN
Downloads 63 (942,565)

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EUV Multi-layer Mirror, Ruthenium Surface, Sn Contaminant, Hydrogen Plasma Cleaning, Matrix Effect

3.

Investigation of the Ion Thermal Effect on Tin Contamination in Low-Temperature Hydrogen Plasma Cleaning

Number of pages: 29 Posted: 01 Apr 2024
Sishu Wang, Andong Wu, Qipeng Lu, Yuan Song, Xingang Yu, Jianjun Wei and Fujun Gou
affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Lanzhou Institute of Chemical Physics, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Sichuan University and affiliation not provided to SSRN
Downloads 55 (1,020,567)

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EUV multilayer mirror, Hydrogen plasma cleaning, Sn particles, Ion energy, Ion thermal effect

4.

Insight into the Re-Deposition Equilibrium and Mitigation of Sn Contaminant During Hydrogen Plasma Cleaning

Number of pages: 33 Posted: 06 Dec 2024
Sishu Wang, Zongbiao Ye, Andong Wu, Tao Gao, Jianjun Wei and Fujun Gou
affiliation not provided to SSRN, Sichuan University, Chinese Academy of Sciences (CAS) - Lanzhou Institute of Chemical Physics, Sichuan University, Sichuan University and affiliation not provided to SSRN
Downloads 33 (1,277,121)
Citation 1

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Ru Surface, Sn Contaminant, Hydrogen Plasma Cleaning, Re-deposition Equilibrium and mitigation