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Yuan Song

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

2

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119

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Scholarly Papers (2)

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1.

Insight into the Re-Deposition Equilibrium of Sn Contaminant on Euv Multi-Layer Mirror Surface During Hydrogen Plasma Cleaning

Number of pages: 27 Posted: 27 Mar 2024
Sishu Wang, Zongbiao Ye, Andong Wu, Qipeng Lu, Yuan Song, Xingang Yu, Jianjun Wei, Tao Gao and Fujun Gou
affiliation not provided to SSRN, Sichuan University, Chinese Academy of Sciences (CAS) - Lanzhou Institute of Chemical Physics, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Sichuan University, Sichuan University and affiliation not provided to SSRN
Downloads 63 (942,565)

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EUV Multi-layer Mirror, Ruthenium Surface, Sn Contaminant, Hydrogen Plasma Cleaning, Matrix Effect

2.

Investigation of the Ion Thermal Effect on Tin Contamination in Low-Temperature Hydrogen Plasma Cleaning

Number of pages: 29 Posted: 01 Apr 2024
Sishu Wang, Andong Wu, Qipeng Lu, Yuan Song, Xingang Yu, Jianjun Wei and Fujun Gou
affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Lanzhou Institute of Chemical Physics, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Sichuan University and affiliation not provided to SSRN
Downloads 56 (1,020,567)

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EUV multilayer mirror, Hydrogen plasma cleaning, Sn particles, Ion energy, Ion thermal effect