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Sumin Kang

affiliation not provided to SSRN

SCHOLARLY PAPERS

3

DOWNLOADS

260

TOTAL CITATIONS

2

Scholarly Papers (3)

1.

Identifying the Weakest Interface in Beol Structures

Number of pages: 37 Posted: 03 Feb 2025
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Korea Advanced Institute of Science and Technology (KAIST) - Department of Mechanical Engineering
Downloads 110 (640,165)

Abstract:

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adhesion, BEOL, surface treatment, Dielectric constant, Deposition sequence, Adhesion mapping

2.

Effects of Surface Treatments for the Adhesion Improvement between Cu and Sicn in Beol Interconnect

Number of pages: 20 Posted: 21 May 2024
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Korea Advanced Institute of Science and Technology (KAIST) - Department of Mechanical Engineering
Downloads 91 (747,755)
Citation 2

Abstract:

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mechanical reliability, interfacial adhesion, surface treatments, crystallographic orientations, alternating crack path, semiconductor device

3.

Role of Loading Mode on Crack Propagation Behavior and Adhesion at Cu–Sicn Interface

Number of pages: 30 Posted: 19 Oct 2024
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Korea Advanced Institute of Science and Technology (KAIST) - Department of Mechanical Engineering
Downloads 59 (1,000,027)

Abstract:

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loading mode, crack path, adhesion, surface treatment, fracture test method