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Ho Jun Chang

affiliation not provided to SSRN

SCHOLARLY PAPERS

1

DOWNLOADS

110

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0

Scholarly Papers (1)

1.

Identifying the Weakest Interface in Beol Structures

Number of pages: 37 Posted: 03 Feb 2025
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Korea Advanced Institute of Science and Technology (KAIST) - Department of Mechanical Engineering
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Abstract:

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adhesion, BEOL, surface treatment, Dielectric constant, Deposition sequence, Adhesion mapping