Yunlong He

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Enhancement of Positive Bevel Β-Ga2o3 Trench Mos Barrier Schottky Diode by Post-Etching Treatment

Number of pages: 6 Posted: 30 Aug 2024
Fang Zhang, Xuefeng Zheng, Yehong Li, Zijian Yuan, Shaozhong Yue, Xichen Wang, Yunlong He, Xiaoli Lu, Xiaohua Ma and Yue Hao
affiliation not provided to SSRN, Xidian University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Xidian University and Xidian University
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β-Ga2O3, Trench MOS barrier Schottky (TMBS), positive bevel, post-etching treatment.