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Jean-Charles Vanel
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Ultrathin Sin Barrier Enables Improved Gan Growth on Si by Remote-Plasma Cvd
Number of pages: 19
Posted: 17 Sep 2024
Lise Watrin
,
Kassiogé Dembélé
,
Pavel Bulkin
,
François Silva
,
Cyril Jadaud
, Jean-Charles Vanel,
Jean-Luc Maurice
,
Erik Johnson
,
Karim Ouaras
and
Pere Roca i Cabarrocas
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,
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,
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,
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,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
and Institut Polytechnique de Paris - Le Laboratoire de physique des interfaces et couches minces (LPICM)
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Abstract:
GaN, interface, Si, meltback etching, plasma
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